Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039196 | Method of forming fine patterns using a block copolymer | Kyoung Taek Kim, Hyun-Woo Kim, Sang Ouk Kim, Shi-Yong Yi | 2011-10-18 |
| 7939223 | Photomask using separated exposure technique, method of fabricating photomask, and apparatus for fabricating photomask by using the method | Hak-Seung Han, Byung-Gook Kim, Hee-Bom Kim, Sung Ho Park | 2011-05-10 |