Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7939223 | Photomask using separated exposure technique, method of fabricating photomask, and apparatus for fabricating photomask by using the method | Hak-Seung Han, Seong-woon Choi, Byung-Gook Kim, Sung Ho Park | 2011-05-10 |
| 7897299 | Phase-shift mask and method of forming the same | Gi-Sung Yoon, Sun Young Choi | 2011-03-01 |
| 7865866 | Method of inspecting mask using aerial image inspection apparatus | Min Kyu JI, Sun Young Choi, Hyun-Joo Baik | 2011-01-04 |