Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932019 | Gettering members, methods of forming the same, and methods of performing immersion lithography using the same | Jin Young Yoon, Hyun-Woo Kim, Chan-Soo Hwang | 2011-04-26 |