Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968463 | Formation method of metallic compound layer, manufacturing method of semiconductor device, and formation apparatus for metallic compound layer | Takashi Nakagawa, Toru Tatsumi, Nobuyuki Ikarashi, Kensuke Takahashi, Kenzo Manabe | 2011-06-28 |