Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026554 | Semiconductor device and manufacturing method thereof | — | 2011-09-27 |
| 7968463 | Formation method of metallic compound layer, manufacturing method of semiconductor device, and formation apparatus for metallic compound layer | Takashi Nakagawa, Toru Tatsumi, Makiko Oshida, Nobuyuki Ikarashi, Kensuke Takahashi | 2011-06-28 |
| 7875935 | Semiconductor device and method for manufacturing the same | — | 2011-01-25 |