Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968463 | Formation method of metallic compound layer, manufacturing method of semiconductor device, and formation apparatus for metallic compound layer | Takashi Nakagawa, Toru Tatsumi, Makiko Oshida, Nobuyuki Ikarashi, Kenzo Manabe | 2011-06-28 |
| 7911004 | Semiconductor device and manufacturing method of the same | — | 2011-03-22 |
| 7911007 | Semiconductor device and method of manufacturing the same | — | 2011-03-22 |