Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067147 | Removable pellicle for immersion lithography | Peter Dirksen, Robert Duncan Morton, Peter Zandbergen, Yuri Aksenov, Jeroen Herman Lammers +2 more | 2011-11-29 |
| 7989155 | Lithographic method | Peter Zandbergen, Jeroen Herman Lammers | 2011-08-02 |
| 7897323 | Lithographic method | Peter Zandbergen | 2011-03-01 |
| 7897324 | Lithographic method | Peter Zandbergen, Jeroen Herman Lammers | 2011-03-01 |