Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067147 | Removable pellicle for immersion lithography | Robert Duncan Morton, Peter Zandbergen, David Van Steenwinckel, Yuri Aksenov, Jeroen Herman Lammers +2 more | 2011-11-29 |
| RE42849 | Lithographic apparatus and device manufacturing method | Paulus Cornelis Duineveld, Aleksey Yurievich Kolesnychenko, Helmar Van Santen | 2011-10-18 |