Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067147 | Removable pellicle for immersion lithography | Peter Dirksen, Robert Duncan Morton, Peter Zandbergen, David Van Steenwinckel, Jeroen Herman Lammers +2 more | 2011-11-29 |