Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067147 | Removable pellicle for immersion lithography | Peter Dirksen, Robert Duncan Morton, Peter Zandbergen, David Van Steenwinckel, Yuri Aksenov +2 more | 2011-11-29 |
| 7989155 | Lithographic method | Peter Zandbergen, David Van Steenwinckel | 2011-08-02 |
| 7897324 | Lithographic method | Peter Zandbergen, David Van Steenwinckel | 2011-03-01 |