Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072592 | Reticle defect inspection apparatus and reticle defect inspection method | Toshiyuki Watanabe | 2011-12-06 |
| 8049897 | Reticle defect inspection apparatus and inspection method using thereof | Ryoichi Hirano | 2011-11-01 |
| 8004655 | Automatic focus adjusting mechanism and optical image acquisition apparatus | Masataka Shiratsuchi, Yoshinori Honguh, Masatoshi Hirono, Shinji Sugihara | 2011-08-23 |
| 7911599 | Reticle defect inspection apparatus and reticle defect inspection method | Toshiyuki Watanabe | 2011-03-22 |
| 7894051 | Reticle defect inspection apparatus and reticle defect inspection method | Ryoichi Hirano | 2011-02-22 |