Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049897 | Reticle defect inspection apparatus and inspection method using thereof | Riki Ogawa | 2011-11-01 |
| 7894051 | Reticle defect inspection apparatus and reticle defect inspection method | Riki Ogawa | 2011-02-22 |