Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004655 | Automatic focus adjusting mechanism and optical image acquisition apparatus | Masataka Shiratsuchi, Yoshinori Honguh, Riki Ogawa, Shinji Sugihara | 2011-08-23 |
| 7935460 | Mask blank for EUV exposure and mask for EUV exposure | — | 2011-05-03 |
| 7863588 | Lighting optical apparatus and sample inspection apparatus | — | 2011-01-04 |