Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085381 | Cleanup method for optics in immersion lithography using sonic device | Hidemi Kawai, W Thomas Novak | 2011-12-27 |
| 8059258 | Liquid jet and recovery system for immersion lithography | W. Thomas Novak, Andrew J. Hazelton | 2011-11-15 |
| 7969552 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2011-06-28 |
| 7965376 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2011-06-21 |
| 7932989 | Liquid jet and recovery system for immersion lithography | W. Thomas Novak, Andrew J. Hazelton | 2011-04-26 |
| 7929111 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2011-04-19 |
| 7929110 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2011-04-19 |
| 7869000 | Stage assembly with lightweight fine stage and low transmissibility | Yoichi Arai, Andrew J. Hazelton, Michael Binnard, W. Thomas Novak, Kirk Lok | 2011-01-11 |