Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035795 | Apparatus and method for maintaining immersion fluid in the gap under the protection lens during wafer exchange in an immersion lithography machine | — | 2011-10-11 |
| 7869000 | Stage assembly with lightweight fine stage and low transmissibility | Yoichi Arai, Andrew J. Hazelton, W. Thomas Novak, Douglas C. Watson, Kirk Lok | 2011-01-11 |