Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8059258 | Liquid jet and recovery system for immersion lithography | Andrew J. Hazelton, Douglas C. Watson | 2011-11-15 |
| 8018657 | Optical arrangement of autofocus elements for use with immersion lithography | — | 2011-09-13 |
| 7969552 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2011-06-28 |
| 7965376 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2011-06-21 |
| 7932989 | Liquid jet and recovery system for immersion lithography | Andrew J. Hazelton, Douglas C. Watson | 2011-04-26 |
| 7929111 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2011-04-19 |
| 7929110 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2011-04-19 |
| 7889207 | Image apparatus with image noise compensation | Li Hong, Maki Suzuki, Mark Takita | 2011-02-15 |
| 7869000 | Stage assembly with lightweight fine stage and low transmissibility | Yoichi Arai, Andrew J. Hazelton, Michael Binnard, Douglas C. Watson, Kirk Lok | 2011-01-11 |