Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085381 | Cleanup method for optics in immersion lithography using sonic device | Douglas C. Watson, W Thomas Novak | 2011-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085381 | Cleanup method for optics in immersion lithography using sonic device | Douglas C. Watson, W Thomas Novak | 2011-12-27 |