Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE42175 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda, Toshihiro Tachikawa +1 more | 2011-03-01 |
TK
Takashi Kayamoto
Nhk Spring Co.: 1 patents #23 of 100Top 25%
Overall (2011): #153,602 of 364,097Top 45%
1
Patents 2011