Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8007633 | Surface processing apparatus | Akihiro Egami, Yasumi Sago, Yukito Nakagawa | 2011-08-30 |
| 7976716 | Semiconductor device manufacturing method | Yasumi Sago, Kazuaki Kaneko, Takuji Okada | 2011-07-12 |
| RE42175 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Toshihiro Tachikawa, Tadashi Inokuchi +1 more | 2011-03-01 |