Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976716 | Semiconductor device manufacturing method | Yasumi Sago, Masayoshi Ikeda, Kazuaki Kaneko | 2011-07-12 |
| RE42175 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Masayoshi Ikeda, Toshihiro Tachikawa, Tadashi Inokuchi +1 more | 2011-03-01 |