Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE42175 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda, Tadashi Inokuchi +1 more | 2011-03-01 |
TT
Toshihiro Tachikawa
Nhk Spring Co.: 1 patents #23 of 100Top 25%
Overall (2011): #140,852 of 364,097Top 40%
1
Patents 2011