Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084294 | Method of fabricating organic silicon film, semiconductor device including the same, and method of fabricating the semiconductor device | Tsuneo Takeuchi, Yoshihiro Hayashi | 2011-12-27 |
| 8043957 | Semiconductor device, method for manufacturing semiconductor device and apparatus for manufacturing semiconductor | Hiroto Ohtake, Fuminori Ito, Yoshihiro Hayashi, Hironori Yamamoto | 2011-10-25 |
| 8004087 | Semiconductor device with dual damascene wirings and method for manufacturing same | Mari Amano, Naoya Furutake, Yoshihiro Hayashi | 2011-08-23 |
| 7999391 | Multilayered wiring structure, and method for manufacturing multilayered wiring | Hiroto Ootake, Masayoshi Tagami, Yoshihiro Hayashi | 2011-08-16 |
| 7968434 | Method of forming of a semiconductor film, method of manufacture of a semiconductor device and a semiconductor device | Krishna C. Saraswat | 2011-06-28 |
| 7923384 | Formation method of porous insulating film, manufacturing apparatus of semiconductor device, manufacturing method of semiconductor device, and semiconductor device | Naoya Furutake, Tsuneo Takeuchi, Yoshihiro Hayashi | 2011-04-12 |
| 7867906 | Semiconductor device and method for manufacturing same | Mari Amano, Naoya Furutake, Yoshihiro Hayashi | 2011-01-11 |