Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004087 | Semiconductor device with dual damascene wirings and method for manufacturing same | Mari Amano, Munehiro Tada, Yoshihiro Hayashi | 2011-08-23 |
| 7923384 | Formation method of porous insulating film, manufacturing apparatus of semiconductor device, manufacturing method of semiconductor device, and semiconductor device | Munehiro Tada, Tsuneo Takeuchi, Yoshihiro Hayashi | 2011-04-12 |
| 7867906 | Semiconductor device and method for manufacturing same | Mari Amano, Munehiro Tada, Yoshihiro Hayashi | 2011-01-11 |