Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084294 | Method of fabricating organic silicon film, semiconductor device including the same, and method of fabricating the semiconductor device | Munehiro Tada, Yoshihiro Hayashi | 2011-12-27 |
| 8039921 | Wiring structure, semiconductor device and manufacturing method thereof | Fuminori Ito, Yoshihiro Hayashi | 2011-10-18 |
| 7968471 | Porous insulating film, method for producing the same, and semiconductor device using the same | Yoshimichi Harada, Yoshihiro Hayashi, Fuminori Itoh, Kenichiro Hijioka | 2011-06-28 |
| 7923384 | Formation method of porous insulating film, manufacturing apparatus of semiconductor device, manufacturing method of semiconductor device, and semiconductor device | Munehiro Tada, Naoya Furutake, Yoshihiro Hayashi | 2011-04-12 |