Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043957 | Semiconductor device, method for manufacturing semiconductor device and apparatus for manufacturing semiconductor | Munehiro Tada, Fuminori Ito, Yoshihiro Hayashi, Hironori Yamamoto | 2011-10-25 |
| 7999392 | Multilayer wiring structure, semiconductor device, pattern transfer mask and method for manufacturing multilayer wiring structure | Yoshihiro Hayashi | 2011-08-16 |