Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955885 | Methods of forming packaged micro-electromechanical devices | Harmeet Bhugra, Kuolung Lei | 2011-06-07 |
| 7939990 | Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations | Harmeet Bhugra | 2011-05-10 |
| 7898561 | MEMS mirror system for laser printing applications | Xiao Yang, William Spencer Worley, III, Dongmin Chen | 2011-03-01 |
| 7863697 | Method and apparatus for MEMS oscillator | Xiao Yang, Dongmin Chen, Justin Payne, Yuxiang Wang, Wook Ji | 2011-01-04 |