Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071398 | Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processes | — | 2011-12-06 |
| 8066890 | Spatial light modulator with multi-layer landing structures | — | 2011-11-29 |
| 7928632 | Method and structure for an out-of-plane compliant micro actuator | — | 2011-04-19 |
| 7923789 | Method of fabricating reflective spatial light modulator having high contrast ratio | Kegang Huang, Dongmin Chen | 2011-04-12 |
| 7863697 | Method and apparatus for MEMS oscillator | Dongmin Chen, Ye Wang, Justin Payne, Yuxiang Wang, Wook Ji | 2011-01-04 |