Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048287 | Method for selectively removing conductive material from a microelectronic substrate | Scott E. Moore, Scott Meikle | 2011-11-01 |
| 8048756 | Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing | Scott Meikle, Guy T. Blalock | 2011-11-01 |
| 7977251 | High selectivity BPSG to TEOS etchant | Kevin J. Torek | 2011-07-12 |
| 7972485 | Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate | Scott E. Moore, Scott Meikle | 2011-07-05 |
| 7973388 | Semiconductor structures including square cuts in single crystal silicon | Janos Fucsko, David H. Wells | 2011-07-05 |