Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084845 | Subresolution silicon features and methods for forming the same | Mark Fischer, Robert J. Hanson | 2011-12-27 |
| 7977037 | Photoresist processing methods | Todd R. Abbott, Sandra Tagg, Amy Weatherly | 2011-07-12 |
| 7977251 | High selectivity BPSG to TEOS etchant | Whonchee Lee | 2011-07-12 |
| 7932550 | Method of forming high aspect ratio structures | Kevin R. Shea, Thomas M. Graettinger | 2011-04-26 |