Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048756 | Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing | Whonchee Lee, Scott Meikle | 2011-11-01 |
| 7985679 | Atomic layer deposition methods | — | 2011-07-26 |
| 7936955 | Waveguide for thermo optic device | Howard E. Rhodes, Vishnu K. Agarwal, Gurtej S. Sandhu, James Foresi, Jean-Francois Viens +1 more | 2011-05-03 |
| 7927181 | Apparatus for removing material from microfeature workpieces | — | 2011-04-19 |