Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048287 | Method for selectively removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2011-11-01 |
| 8048756 | Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing | Whonchee Lee, Guy T. Blalock | 2011-11-01 |
| 7972485 | Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2011-07-05 |