Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066553 | Wafer clamping device for a double side grinder | Milind S. Bhagavat, Puneet Gupta, Takuto Kazama, Noriyuki Tachi | 2011-11-29 |
| 7927185 | Method for assessing workpiece nanotopology using a double side wafer grinder | Milind S. Bhagavat | 2011-04-19 |
| 7930058 | Nanotopography control and optimization using feedback from warp data | Sumeet S. Bhagavat, Tomomi Komura, Tomohiko Kaneko, Takuto Kazama | 2011-04-19 |
| 7878883 | Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control | Puneet Gupta, Milind Kulkarni, Carlo Zavattari | 2011-02-01 |