Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066553 | Wafer clamping device for a double side grinder | Milind S. Bhagavat, Puneet Gupta, Roland R. Vandamme, Noriyuki Tachi | 2011-11-29 |
| 7930058 | Nanotopography control and optimization using feedback from warp data | Sumeet S. Bhagavat, Roland R. Vandamme, Tomomi Komura, Tomohiko Kaneko | 2011-04-19 |