Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066553 | Wafer clamping device for a double side grinder | Puneet Gupta, Roland R. Vandamme, Takuto Kazama, Noriyuki Tachi | 2011-11-29 |
| 8058144 | Method for capping a MEMS wafer | Erik Tarvin, Firas Sammoura, Kuang L. Yang, Andrew Sparks | 2011-11-15 |
| 7981723 | Capped wafer method and apparatus | Xue'en Yang, Erik Tarvin | 2011-07-19 |
| 7927185 | Method for assessing workpiece nanotopology using a double side wafer grinder | Roland R. Vandamme | 2011-04-19 |