Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8060330 | Method and system for centering wafer on chuck | Robert Griffith O'Neill, Jorge Luque, Shang-I Chou | 2011-11-15 |
| 7932181 | Edge gas injection for critical dimension uniformity improvement | David Cooperberg, Vahid Vahedi | 2011-04-26 |
| 7928366 | Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access | Jeff A. Bogart, Leonard J. Sharpless | 2011-04-19 |