Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7928366 | Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access | Jeff A. Bogart, Harmeet Singh | 2011-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7928366 | Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access | Jeff A. Bogart, Harmeet Singh | 2011-04-19 |