Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8060330 | Method and system for centering wafer on chuck | Robert Griffith O'Neill, Shang-I Chou, Harmeet Singh | 2011-11-15 |
| 7945085 | User interface for wafer data analysis and visualization | — | 2011-05-17 |