Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932181 | Edge gas injection for critical dimension uniformity improvement | Harmeet Singh, David Cooperberg | 2011-04-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932181 | Edge gas injection for critical dimension uniformity improvement | Harmeet Singh, David Cooperberg | 2011-04-26 |