Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932295 | Organic silica-based film, method of forming the same, composition for forming insulating film for semiconductor device, interconnect structure, and semiconductor device | Hajime Tsuchiya, Hiromi Egawa, Atsushi Shiota | 2011-04-26 |
| 7893538 | Organic silica film and method for forming same, composition for forming insulating film of semiconductor device and method for producing same, wiring structure and semiconductor device | Hisashi Nakagawa, Tatsuya Yamanaka, Masahiro Akiyama, Youhei Nobe | 2011-02-22 |