Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932295 | Organic silica-based film, method of forming the same, composition for forming insulating film for semiconductor device, interconnect structure, and semiconductor device | Hajime Tsuchiya, Hiromi Egawa, Terukazu Kokubo | 2011-04-26 |
| 7875317 | Composition for forming insulating film, method for producing same, silica-based insulating film, and method for forming same | Hisashi Nakagawa, Masahiro Akiyama, Takahiko Kurosawa | 2011-01-25 |