Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017700 | Polycarbosilane, method for producing same, silica composition for coating application, and silica film | Masahiro Akiyama, Tsuyoshi Furukawa, Naohisa Tokushige | 2011-09-13 |
| 7893538 | Organic silica film and method for forming same, composition for forming insulating film of semiconductor device and method for producing same, wiring structure and semiconductor device | Tatsuya Yamanaka, Masahiro Akiyama, Terukazu Kokubo, Youhei Nobe | 2011-02-22 |
| 7875317 | Composition for forming insulating film, method for producing same, silica-based insulating film, and method for forming same | Masahiro Akiyama, Takahiko Kurosawa, Atsushi Shiota | 2011-01-25 |