Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7893538 | Organic silica film and method for forming same, composition for forming insulating film of semiconductor device and method for producing same, wiring structure and semiconductor device | Hisashi Nakagawa, Tatsuya Yamanaka, Masahiro Akiyama, Terukazu Kokubo | 2011-02-22 |