Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8082045 | Substrate processing recipe manager | Yoshiki Ashizawa, Heng-Cheng Pal, Patrick Ngatchou, John Schmidt | 2011-12-20 |
| 8037894 | Maintaining flow rate of a fluid | Rajesh Kelekar, Gaurav Verma | 2011-10-18 |
| 8039052 | Multi-region processing system and heads | Rick Endo, Indranil De, James Tsung, Maosheng Zhao | 2011-10-18 |
| 8011317 | Advanced mixing system for integrated tool having site-isolated reactors | Tony P. Chiang, Aaron Francis, John Schmidt | 2011-09-06 |
| 7993461 | Method and system for mask handling in high productivity chamber | Rick Endo, James Tsung | 2011-08-09 |
| 7955436 | Systems and methods for sealing in site-isolated reactors | Aaron Francis | 2011-06-07 |