Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039052 | Multi-region processing system and heads | Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao | 2011-10-18 |
| 7993461 | Method and system for mask handling in high productivity chamber | Kurt H. Weiner, James Tsung | 2011-08-09 |