Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039052 | Multi-region processing system and heads | Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao | 2011-10-18 |
| 7993461 | Method and system for mask handling in high productivity chamber | Rick Endo, Kurt H. Weiner | 2011-08-09 |
| 7867904 | Method and system for isolated and discretized process sequence integration | Tony P. Chiang, Richard Endo | 2011-01-11 |