Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8082045 | Substrate processing recipe manager | Yoshiki Ashizawa, Heng-Cheng Pal, Patrick Ngatchou, Kurt H. Weiner | 2011-12-20 |
| 8011317 | Advanced mixing system for integrated tool having site-isolated reactors | Kurt H. Weiner, Tony P. Chiang, Aaron Francis | 2011-09-06 |