Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071397 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Kazuhiro Jyouo, Tetsuo Ono | 2011-12-06 |
| 7955514 | Plasma processing apparatus and plasma processing method | Kazue Takahashi, Hitoshi Tamura, Motohiro Tanaka | 2011-06-07 |
| 7931776 | Plasma processing apparatus | Naoshi Itabashi, Tsutomu Tetsuka, Seiichiro Kanno | 2011-04-26 |