Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8024831 | Cleaning method | Kazuyuki Ikenaga, Muneo Furuse | 2011-09-27 |
| 8006340 | Cleaning apparatus | Kazuyuki Ikenaga, Muneo Furuse | 2011-08-30 |
| 7931776 | Plasma processing apparatus | Naoshi Itabashi, Seiichiro Kanno, Motohiko Yoshigai | 2011-04-26 |
| 7908104 | Plasma processing apparatus and method for detecting status of said apparatus | Naoshi Itabashi, Atsushi Itou | 2011-03-15 |