Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7931776 | Plasma processing apparatus | Tsutomu Tetsuka, Seiichiro Kanno, Motohiko Yoshigai | 2011-04-26 |
| 7908104 | Plasma processing apparatus and method for detecting status of said apparatus | Tsutomu Tetsuka, Atsushi Itou | 2011-03-15 |