Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083888 | Plasma processing apparatus | Tsuyoshi Yoshida, Tsuyoshi Matsumoto, Satoru Muto, Kenetsu Yokogawa | 2011-12-27 |
| 8071397 | Semiconductor fabricating apparatus with function of determining etching processing state | Motohiko Yoshigai, Kazuhiro Jyouo, Tetsuo Ono | 2011-12-06 |